✦ LIBER ✦
Sputter coating on high speed steel tube using a hybrid plasma produced by coaxial ECR and magnetron discharges
✍ Scribed by Hiroshi Fujiyama; Hiroharu Kawasaki; Taizoh Fujiyama; Shun Takagi
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 346 KB
- Volume
- 59
- Category
- Article
- ISSN
- 0257-8972
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