Sputter-assisted plasma CVD of wide or narrow optical bandgap amorphous CNx:H films using i-C4H10/N2 supermagnetron plasma

✍ Scribed by Haruhisa Kinoshita; Ryo Ikuta; Tomuo Yamaguchi

• Book ID: 108289931
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 377 KB
• Volume: 516
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2007.10.017