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sp[sup 3]-rich deposition conditions and growth mechanism of tetrahedral amorphous carbon films deposited using filtered arc

โœ Scribed by Zhu, Jiaqi; Han, Jiecai; Han, Xiao; Schlaberg, H. Inaki; Wang, Jiazhi


Book ID
125462732
Publisher
American Institute of Physics
Year
2008
Tongue
English
Weight
434 KB
Volume
104
Category
Article
ISSN
0021-8979

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