✦ LIBER ✦

[Springer Series in MATERIALS SCIENCE] Epitaxy Volume 62 || Closing Remarks

✍ Scribed by Herman, Marian A.; Richter, Wolfgang; Sitter, Helmut

Book ID: 119999836
Publisher: Springer Berlin Heidelberg
Year: 2004
Tongue: English
Weight: 434 KB
Edition: 1
Category: Article
ISBN: 3662070642
DOI: 10.1007/978-3-662-07064-2_16

No coin nor oath required. For personal study only.

✦ Synopsis

Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxy’s coverage of science and texhnology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization.

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