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Splitting of atomic beams by light for creation of high-resolution spatial structures in optical nanolithography

✍ Scribed by Vitkovsky, V. O.; Prants, S. V.

Book ID: 119952625
Publisher: SP MAIK Nauka/Interperiodica
Year: 2013
Tongue: English
Weight: 433 KB
Volume: 114
Category: Article
ISSN: 0030-400X
DOI: 10.1134/S0030400X1301027X

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