✦ LIBER ✦
Spin coating and plasma process for 2.5D integrated photonics on multilayer polymers
✍ Scribed by A. Zebda; L. Camberlein; B. Bêche; E. Gaviot; E. Bêche; D. Duval; J. Zyss; G. Jézéquel; F. Solal; C. Godet
- Book ID
- 108290092
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 863 KB
- Volume
- 516
- Category
- Article
- ISSN
- 0040-6090
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