Spin-Coated Periodic Mesoporous Organosilica Thin Films—Towards a New Generation of Low-Dielectric-Constant Materials

✍ Scribed by B. D. Hatton; K. Landskron; W. Whitnall; D. D. Perovic; G. A. Ozin

• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 398 KB
• Volume: 15
• Category: Article
• ISSN: 1616-301X
• DOI: 10.1002/adfm.200400221

✦ Synopsis

Scheme 1. Siloxane and silsesquioxane precursors used for film synthesis.