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SPIE Proceedings [SPIE XI Feofilov Symposium on Spectropscopy of Crystals Activated by Rare-Earth and Transition Metal Ions - Kazan, Russia (Monday 24 September 2001)] XI Feofilov Symposium on Spectroscopy of Crystals Activated by Rare-Earth and Transition Metal Ions - VUV spectroscopy of nominally pure and rare-earth ions doped LiCaAIF6 single crystals as promising materials for 157 nm photolithography

✍ Scribed by Cefalas, Alkiviadis C.; Sarantopoulou, Evangelia; Kollia, Z; Abdulsabirov, R. Y.; Korableva, S. L.; Naumov, A. K.; Semashko, V. V.; Kobe, S; McGuiness, P J.; Kaplyanskii, Alexander A.; Malkin, Boris Z.; Nikitin, Sergey I.

Book ID: 118118643
Publisher: SPIE
Year: 2002
Weight: 243 KB
Volume: 4766
Category: Article
DOI: 10.1117/12.475332

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