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SPIE Proceedings [SPIE The 14th International Symposium on: Smart Structures and Materials & Nondestructive Evaluation and Health Monitoring - San Diego, California (Sunday 18 March 2007)] Behavior and Mechanics of Multifunctional and Composite Materials 2007 - Tensile and compressive stress dependency of the transverse (e31,f) piezoelectric coefficient of PZT thin films for MEMS devices

✍ Scribed by Prume, Klaus; Muralt, Paul; Schmitz-Kempen, Thorsten; Tiedke, Stephan; Dapino, Marcelo J.

Book ID
120179282
Publisher
SPIE
Year
2007
Weight
298 KB
Volume
6526
Category
Article

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