✦ LIBER ✦
SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] MEMS Reliability for Critical and Space Applications - Reliability issues of COTS MEMS for aerospace applications
✍ Scribed by Ramesham, Rajeshuni; Ghaffarian, Reza; Kim, Namsoo P.; Lawton, Russell A.; Miller, William M.; Lin, Gisela; Ramesham, Rajeshuni
- Book ID
- 120975650
- Publisher
- SPIE
- Year
- 1999
- Weight
- 458 KB
- Volume
- 3880
- Category
- Article
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