SPIE Proceedings [SPIE Symposium on Integrated Optoelectronic Devices - San Jose, CA (Friday 18 January 2002)] Vertical-Cavity Surface-Emitting Lasers VI - Fabrication control during AlAs oxidation of the VCSELs via optical probing technique of AlAs lateral oxidation (OPTALO)

✍ Scribed by Sakamoto, Akira; Nakayama, Hideo; Nakamura, Takeshi; Lei, Chun; Kilcoyne, Sean P.

• Book ID: 121226652
• Publisher: SPIE
• Year: 2002
• Weight: 723 KB
• Volume: 4649
• Category: Article
• DOI: 10.1117/12.469236