SPIE Proceedings [SPIE SPIE's 8th Annual International Symposium on Smart Structures and Materials - Newport Beach, CA (Sunday 4 March 2001)] Smart Structures and Materials 2001: Smart Electronics and MEMS - Design, simulation, and testing of IDT-based MEMS gyroscope

✍ Scribed by Suh, William D.; Jose, K. A.; Xavier, Pascal B.; Varadan, Vijay K.; Varadan, Vasundara V.; Varadan, Vijay K.

• Book ID: 120449233
• Publisher: SPIE
• Year: 2001
• Weight: 393 KB
• Volume: 4334
• Category: Article
• DOI: 10.1117/12.436589