SPIE Proceedings [SPIE SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 9 July 1995)] Interferometry VII: Applications - New interferometric method for thin-film metrology

✍ Scribed by Gerasimova, Ludmila A.; Fedorov, Alexander O.; Pryputniewicz, Ryszard J.; Brown, Gordon M.; Jueptner, Werner P. O.

• Book ID: 120370142
• Publisher: SPIE
• Year: 1995
• Weight: 145 KB
• Volume: 2545
• Category: Article
• DOI: 10.1117/12.212653