SPIE Proceedings [SPIE SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 24 July 1994)] Optical Thin Films IV: New Developments - Optical and electrical properties of reactively sputtered TiN, ZrN, and HfN thin films

✍ Scribed by Edlou, Samad M.; Simons, John C.; Al-Jumaily, Ghanim A.; Raouf, Nasrat A.; Rancourt, James D.

• Book ID: 120577364
• Publisher: SPIE
• Year: 1994
• Weight: 281 KB
• Volume: 2262
• Category: Article
• DOI: 10.1117/12.185781