SPIE Proceedings [SPIE SPIE Solar Energy + Technology - San Diego, California, United States (Sunday 25 August 2013)] Laser Material Processing for Solar Energy Devices II - Comparison of picosecond laser sources for SiNx ablation with subsequent nickel silicide formation by excimer laser annealing (ELA) for high efficiency silicon solar cells

✍ Scribed by Gall, S.; Vibert, J.; Pirot, M.; Lerat, J.-F.; Emeraud, T.; Le Quang, N.; Slaoui, Abdelilah; Bahouka, A.; Reutzel, Edward W.

• Book ID: 121211978
• Publisher: SPIE
• Year: 2013
• Weight: 472 KB
• Volume: 8826
• Category: Article
• DOI: 10.1117/12.2025560