SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - The influence of physical characteristics on ablation effects in UV laser assisted micro-engineering

✍ Scribed by Ostendorf, Andreas; Kulik, Christian J.; Temme, Thorsten; Otte, Frank; Samm, Katja; Miyamoto, Isamu; Helvajian, Henry; Itoh, Kazuyoshi; Kobayashi, Kojiro F.; Ostendorf, Andreas; Sugioka, Koji

• Book ID: 120065566
• Publisher: SPIE
• Year: 2004
• Weight: 492 KB
• Category: Article
• DOI: 10.1117/12.596754