SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Nanorelief elements in reference measures for scanning electron microscopy

✍ Scribed by Novikov, Yu. A.; Darznek, S. A.; Filippov, M. N.; Mityukhlyaev, V. B.; Rakov, A. V.; Todua, P. A.; Valiev, Kamil A.; Orlikovsky, Alexander A.

• Book ID: 115531421
• Publisher: SPIE
• Year: 2008
• Weight: 304 KB
• Volume: 0
• Category: Article
• DOI: 10.1117/12.802428