SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Modeling of dielectric polarization during an electron beam exposure

✍ Scribed by Borisov, S. S.; Grachev, Eugene A.; Zaitsev, S. I.; Negulyaev, N. N.; Cheremukhin, E. A.; Filachev, Anatoly M.

• Book ID: 120029563
• Publisher: SPIE
• Year: 2004
• Weight: 701 KB
• Category: Article
• DOI: 10.1117/12.552222