SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Micro-machining of silicon and glass with picosecond lasers

✍ Scribed by Raciukaitis, Gediminas; Brikas, Marijus; Miyamoto, Isamu; Helvajian, Henry; Itoh, Kazuyoshi; Kobayashi, Kojiro F.; Ostendorf, Andreas; Sugioka, Koji

• Book ID: 120849510
• Publisher: SPIE
• Year: 2004
• Weight: 342 KB
• Category: Article
• DOI: 10.1117/12.596604