SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Formation of conductive structures in insulate layers by selective removal of atoms technique

✍ Scribed by Gurovich, B.; Prikhodko, K.; Domantovsky, A.; Kuleshova, E.; Olshansky, E.; Maslakov, K.; Lunin, Y.; Valiev, Kamil A.; Orlikovsky, Alexander A.

• Book ID: 111643716
• Publisher: SPIE
• Year: 2006
• Weight: 709 KB
• Volume: 0
• Category: Article
• DOI: 10.1117/12.677147