SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - FET on ultrathin SOI (fabrication and research)

✍ Scribed by Naumova, Olga V.; Antonova, Irina V.; Popov, Vladimir P.; Nastaushev, Yury V.; Gavrilova, Tatiana A.; Kachanova, Marina M.; Litvin, Litvin V.; Aseev, Alexander L.; Valiev, Kamil A.; Orlikovsky, Alexander A.

• Book ID: 121312126
• Publisher: SPIE
• Year: 2004
• Weight: 602 KB
• Category: Article
• DOI: 10.1117/12.558394