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SPIE Proceedings [SPIE SPIE Optical Systems Design - Marseille, France (Monday 5 September 2011)] Advances in Optical Thin Films IV - Mg-based multilayers and their thermal stabilities for EUV range

✍ Scribed by Zhu, Jingtao; Zhou, Sika; Li, Haochuan; Huang, Qiushi; Jiang, Li; Wang, Fengli; Zhang, Zhong; Wang, Zhanshan; Zhou, Hongjun; Huo, Tonglin; Lequime, Michel; Macleod, H. Angus; Ristau, Detlev

Book ID: 111985596
Publisher: SPIE
Year: 2011
Weight: 512 KB
Volume: 8168
Category: Article
DOI: 10.1117/12.896405

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