SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Infrared Sensors, Devices, and Applications III - Wavelength stabilization of electrostatically actuated micromechanical infrared Fabry-Pérot filters

✍ Scribed by Schröter, Jörg R.; Lehmann, Sebastian; Ebermann, Martin; Neumann, Norbert; LeVan, Paul D.; Sood, Ashok K.; Wijewarnasuriya, Priyalal S.; D'Souza, Arvind I.

• Book ID: 121391584
• Publisher: SPIE
• Year: 2013
• Weight: 907 KB
• Volume: 8868
• Category: Article
• DOI: 10.1117/12.2024822