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SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, United States (Sunday 25 August 2013)] Nanostructured Thin Films VI - Growth of IGZO thin films and fabrication of transparent thin film transistor by RF magnetron sputtering

✍ Scribed by Sanal, K. C.; Majeesh, M.; Jayaraj, M. K.; Mackay, Tom G.; Lakhtakia, Akhlesh; Jen, Yi-Jun; Suzuki, Motofumi

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