SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II - High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis

✍ Scribed by Ahn, Se Hyun; Guo, L. Jay; Suleski, Thomas J.; Schoenfeld, Winston V.; Wang, Jian J.

• Book ID: 120505958
• Publisher: SPIE
• Year: 2009
• Weight: 856 KB
• Volume: 7205
• Category: Article
• DOI: 10.1117/12.809821