SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - Comparison among performance of strain sensors based on different semiconductor thin films

✍ Scribed by Fraga, Mariana A.; Furlan, Humber; Pessoa, Rodrigo S.; Schmid, Ulrich; Sánchez-Rojas, José Luis; Leester-Schaedel, Monika

• Book ID: 120183750
• Publisher: SPIE
• Year: 2011
• Weight: 680 KB
• Volume: 8066
• Category: Article
• DOI: 10.1117/12.886624