SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Nanotechnology VI - Influence of irregular growth of monoatomic steps during Si/Si(001) epitaxy on generation of surface defects

✍ Scribed by Arapkina, Larisa V.; Yuryev, Vladimir A.; Adelung, Rainer

• Book ID: 121245416
• Publisher: SPIE
• Year: 2013
• Weight: 663 KB
• Volume: 8766
• Category: Article
• DOI: 10.1117/12.2017083