SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, USA (Saturday 2 February 2013)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII - Laser processing of 2D and 3D metamaterial structures

✍ Scribed by Charipar, Nicholas A.; Charipar, Kristin M.; Kim, Heungsoo; Kirleis, Matthew A.; Auyeung, Ray C. Y.; Smith, Andrew T.; Mathews, Scott A.; Piqué, Alberto; Xu, Xianfan; Hennig, Guido; Nakata, Yoshiki; Roth, Stephan W.

• Book ID: 120387754
• Publisher: SPIE
• Year: 2013
• Weight: 584 KB
• Volume: 8607
• Category: Article
• DOI: 10.1117/12.2006496