SPIE Proceedings [SPIE SPIE LASE - San Francisco, California (Saturday 21 January 2012)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII - Direct investigation of the ablation rate evolution during laser drilling of high aspect ratio micro-holes

✍ Scribed by Mezzapesa, Francesco P.; Sibillano, Teresa; Columbo, Lorenzo L.; Di Niso, Francesca; Ancona, Antonio; Dabbicco, Maurizio; De Lucia, Francesco; Lugarà, Pietro M.; Scamarcio, Gaetano; Hennig, Guido; Xu, Xianfan; Gu, Bo; Nakata, Yoshiki

• Book ID: 115535904
• Publisher: SPIE
• Year: 2012
• Weight: 514 KB
• Volume: 8243
• Category: Article
• DOI: 10.1117/12.905758