SPIE Proceedings [SPIE SPIE LASE: Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 24 January 2009)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VII - A study of material removal rates for shallow drilling with an ultrashort pulse laser

✍ Scribed by Campbell, B. R.; Forster, L. A.; Moore, J. A.; Lehecka, T. M.; Thomas, J. G.; Semak, V. V.; Meunier, Michel; Holmes, Andrew S.; Niino, Hiroyuki; Gu, Bo

• Book ID: 121225966
• Publisher: SPIE
• Year: 2009
• Weight: 626 KB
• Volume: 7201
• Category: Article
• DOI: 10.1117/12.810173