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SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Baltimore, Maryland, USA (Monday 29 April 2013)] Scanning Microscopies 2013: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences - Monte Carlo study of the influence of electron beam focusing to SEM linewidth measurement

✍ Scribed by Zhang, P.; Mao, S. F.; Zhang, Z. M.; Ding, Z. J.; Postek, Michael T.; Newbury, Dale E.; Platek, S. Frank; Maugel, Tim K.

Book ID
121420427
Publisher
SPIE
Year
2013
Weight
666 KB
Volume
8729
Category
Article

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