SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Baltimore, Maryland, USA (Monday 23 April 2012)] Next-Generation Spectroscopic Technologies V - Realization of a hybrid-integrated MEMS scanning grating spectrometer

✍ Scribed by Pügner, Tino; Druy, Mark A.; Crocombe, Richard A.; Knobbe, Jens; Grüger, Heinrich; Schenk, Harald

• Book ID: 120405296
• Publisher: SPIE
• Year: 2012
• Weight: 532 KB
• Volume: 8374
• Category: Article
• DOI: 10.1117/12.919068