SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Baltimore, Maryland, USA (Monday 23 April 2012)] Micro- and Nanotechnology Sensors, Systems, and Applications IV - Microsystems: Technology Enabler

✍ Scribed by George, Thomas; Okandan, Murat; Islam, M. Saif; Dutta, Achyut

• Book ID: 120381779
• Publisher: SPIE
• Year: 2012
• Weight: 691 KB
• Volume: 8373
• Category: Article
• DOI: 10.1117/12.921338