SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer and Grazing Incidence X-Ray/EUV Optics - Design and analysis of soft x-ray imaging microscopes

✍ Scribed by Shealy, David L.; Wang, Cheng; Jiang, Wu; Hoover, Richard B.; Hoover, Richard B.

• Book ID: 111952218
• Publisher: SPIE
• Year: 1992
• Weight: 325 KB
• Volume: 1546
• Category: Article
• DOI: 10.1117/12.51229