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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] MEMS, MOEMS, and Micromachining - Development of a NIR microspectrometer based on a MOEMS scanning grating

✍ Scribed by Zimmer, Fabian; Grueger, Heinrich; Heberer, Andreas; Wolter, Alexander; Schenk, Harald; Urey, Hakan; El-Fatatry, Ayman

Book ID: 121396614
Publisher: SPIE
Year: 2004
Weight: 807 KB
Volume: 5455
Category: Article
DOI: 10.1117/12.544638

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