SPIE Proceedings [SPIE Photonics Asia - Beijing, China (Monday 5 November 2012)] Optical Design and Testing V - Test of diffractive optical element for DUV lithography system using visible laser

✍ Scribed by Hu, Zhonghua; Zhu, Jing; Yang, Baoxi; Xiao, Yanfen; Zeng, Aijun; Huang, Huijie; Wang, Yongtian; Du, Chunlei; Hua, Hong; Tatsuno, Kimio; Urbach, H. Paul

• Book ID: 121492593
• Publisher: SPIE
• Year: 2012
• Weight: 447 KB
• Volume: 8557
• Category: Article
• DOI: 10.1117/12.999681