SPIE Proceedings [SPIE Photonics Asia 2007 - Beijing, China (Sunday 11 November 2007)] Optical Design and Testing III - An optical method of online measurement for the thickness of thin films

✍ Scribed by Song, Min; Zheng, Yaru; Lu, Yongjun; Qu, Yanling; Wang, Yongtian; Tschudi, Theo T.; Rolland, Jannick P.; Tatsuno, Kimio

• Book ID: 120434971
• Publisher: SPIE
• Year: 2007
• Weight: 318 KB
• Volume: 6834
• Category: Article
• DOI: 10.1117/12.756978