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SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] Advanced Microlithography Technologies - EUV/soft x-ray multilayer optics

✍ Scribed by Yulin, Sergiy A.; Feigl, Torsten; Benoit, Nicolas; Kaiser, Norbert; Wang, Yangyuan; Yao, Jun-en; Progler, Christopher J.

Book ID: 121468035
Publisher: SPIE
Year: 2005
Weight: 630 KB
Volume: 5645
Category: Article
DOI: 10.1117/12.579520

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