✦ LIBER ✦
SPIE Proceedings [SPIE Optoelectronics and High-Power Lasers & Applications - San Jose, CA (Saturday 24 January 1998)] Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II - Electrostatically actuated stylus profiler with capacitive displacement sensing in vertical and lateral directions
✍ Scribed by Kearny, Mike D.; Furman, Burford J.; Stover, John C.
- Book ID
- 120617100
- Publisher
- SPIE
- Year
- 1998
- Weight
- 362 KB
- Volume
- 3275
- Category
- Article
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