SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Laser Applications in Microelectronic and Optoelectronic Manufacturing IV - Condensation of vapor and nanoclusters formation within the vapor plume produced by nanosecond laser ablation of Si, Ge, and C

✍ Scribed by Luk'yanchuk, Boris S.; Marine, W.; Anisimov, Sergei I.; Simakina, G. A.; Dubowski, Jan J.; Helvajian, Henry; Kreutz, Ernst-Wolfgang; Sugioka, Koji

• Book ID: 115493716
• Publisher: SPIE
• Year: 1999
• Weight: 932 KB
• Volume: 3618
• Category: Article
• DOI: 10.1117/12.352703