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SPIE Proceedings [SPIE Optical Science, Engineering and Instrumentation '97 - San Diego, CA (Sunday 27 July 1997)] Sol-Gel Optics IV - Formation of photosensitive alumina-based gel films and their application to fine patterning

✍ Scribed by Tohge, Noboru; Zhao, Gaoyang; Dunn, Bruce S.; Mackenzie, John D.; Pope, Edward J. A.; Schmidt, Helmut K.; Yamane, Masayuki

Book ID: 121353665
Publisher: SPIE
Year: 1997
Weight: 736 KB
Volume: 3136
Category: Article
DOI: 10.1117/12.284120

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