SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Optical Modeling and Performance Predictions - Grating efficiencies comparison study: calculations versus metrology for various types of high groove density gratings at VUV-UV wavelengths

✍ Scribed by Kuznetsov, Ivan G.; Wilkinson, Erik; Content, David A.; Boucarut, Rene A.; Madison, Timothy J.; Kahan, Mark A.

• Book ID: 121418341
• Publisher: SPIE
• Year: 2004
• Weight: 533 KB
• Volume: 5178
• Category: Article
• DOI: 10.1117/12.507946