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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Optical Materials and Structures Technologies - Indentation hardness and modulus of the surface of a large super-polished single crystal silicon sphere

โœ Scribed by Leistner, Achim J.; Fischer-Cripps, Anthony C.; Bennett, Jean M.; Goodman, William A.


Book ID
120820056
Publisher
SPIE
Year
2003
Weight
282 KB
Volume
5179
Category
Article

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