✦ LIBER ✦
SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 23 June 2003)] Microsystems Engineering: Metrology and Inspection III - Simultaneous mapping of phase and amplitude of MEMS vibrations by microscopic interferometry with stroboscopic illumination
✍ Scribed by Petitgrand, Sylvain; Bosseboeuf, Alain; Gorecki, Christophe
- Book ID
- 118278590
- Publisher
- SPIE
- Year
- 2003
- Weight
- 943 KB
- Volume
- 5145
- Category
- Article
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