✦ LIBER ✦
SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Modeling Aspects in Optical Metrology - Numerical simulation tool for synthetic speckle pattern images and their intensity-based integration under variable conditions for metrology applications
✍ Scribed by Riechert, Falko; Bastian, Georg; Lemmer, Uli; Bosse, Harald; Bodermann, Bernd; Silver, Richard M.
- Book ID
- 115475435
- Publisher
- SPIE
- Year
- 2007
- Weight
- 488 KB
- Volume
- 6617
- Category
- Article
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