SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface - A dual-reflective electrothermal MEMS micromirror for full circumferential scanning endoscopic imaging

✍ Scribed by Wu, Lei; Xie, Huikai; Tadigadapa, Srinivas A.; Parviz, Babak A.; Henning, Albert K.

• Book ID: 120410415
• Publisher: SPIE
• Year: 2008
• Weight: 646 KB
• Volume: 6885
• Category: Article
• DOI: 10.1117/12.769621