✦ LIBER ✦
SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication - Fabrication and performance of d33-mode lead-zirconate-titanate (PZT) MEMS accelerometers
✍ Scribed by Yu, Han G.; Wolf, Richard; Deng, Kan; Zou, Lichun; Tadigadapa, Srinivas; Troilier-McKinstry, Susan; Helvajian, Henry; Janson, Siegfried W.; Laermer, Franz
- Book ID
- 121189735
- Publisher
- SPIE
- Year
- 2001
- Weight
- 88 KB
- Volume
- 4559
- Category
- Article
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