✦ LIBER ✦
SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Advances in Resist Technology and Processing XVI - Design of a new bottom antireflective coating composition for KrF resist
✍ Scribed by Mizutani, Kazuyoshi; Momota, Makoto; Aoai, Toshiaki; Yagihara, Morio; Conley, Will
- Book ID
- 120562279
- Publisher
- SPIE
- Year
- 1999
- Weight
- 792 KB
- Volume
- 3678
- Category
- Article
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