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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] Microelectronics: Design, Technology, and Packaging II - Low-loss SPDT metal-to-metal contacts RF MEMS switch operated by electrostatic actuation

✍ Scribed by Seki, T.; Uno, Y.; Narise, K.; Masuda, T.; Inoue, K.; Sato, S.; Jojima, M.; Sato, F.; Imanaka, K.; Sugiyama, S.; Hariz, Alex J.

Book ID: 120481472
Publisher: SPIE
Year: 2005
Weight: 346 KB
Volume: 6035
Category: Article
DOI: 10.1117/12.638510

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