SPIE Proceedings [SPIE Merida - DL Tentative - Merida, Mexico (Monday 14 February 2005)] Eighth International Symposium on Laser Metrology - Recent developments in spectral interference microscopes

✍ Scribed by Takeda, Mitsuo; Mehta, Dalip S.; Pawlowski, Michal E.; Kurokawa, Takashi; Rodriguez-Vera, R.; Mendoza-Santoyo, F.

• Book ID: 120579350
• Publisher: SPIE
• Year: 2005
• Weight: 627 KB
• Volume: 5776
• Category: Article
• DOI: 10.1117/12.611596